PLASSYS MEB550S4 superconducting thin-film deposition system

We have a PLASSYS MEB550S4 e-beam evaporation/magnetron sputtering integrated deposition system, hosted in the

Notre Dame Cleanroom. It is a key tool for us to make superconducting quantum devices (resonators, Josephson-junction qubits, parametric amplifiers, nanowire single-photon detectors, etc.). Without breaking the vacuum, a robot arm automatically transfers 4’’ wafers or smaller chips between the evaporation (Al, AlOx, GrAl) and the sputtering (Nb, Ti, NbN, TiN) chamber.

The system features most state of the art functionalities:
✔ full automation
✔ ultra-high vacuum (< 9×10^-9 mbar)
✔ in-situ ion milling
✔ double-angle shadow evaporation
✔ back heating up to 750 °C

Location: Notre Dame Cleanroom